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CAM reference for inspection of contour images (1)

建立日期：2018/02/21
  • 作者： Orbotech
  • 出處： USPTO-美國專利商標局
  • 內容： 本篇內容為Orbotech於May 15, 2007 獲證之美國專利，下文為專利摘要，專利全文請連結參考網址，瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。

    Orbotech後續針對此發明，另提出改良案，將另行介紹。

    This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.

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