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Method and apparatus for simultaneous 2-D and topographical inspection

建立日期：2018/02/21
  • 作者： Orbotech
  • 出處： USPTO-美國專利商標局
  • 內容： 本篇內容為Orbotech於August 7, 2007 獲證之美國專利，下文為專利摘要，專利全文請連結參考網址，瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。

    Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.
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