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Illuminator for inspecting substantially flat surfaces (1)
建立日期:2018/02/21
作者:
Orbotech
出處:
USPTO-美國專利商標局
內容:
本篇內容為Orbotech於January 25, 2005 獲證之美國專利,下文為專利摘要,專利全文請連結參考網址,瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。
Orbotech後續針對此發明,另提出改良案,將另行介紹。
Illuminator apparatus for illuminating a workpiece during visual testing thereof, the illuminator comprising: a source of illumination that illuminates a portion of the workpiece with on-axis illumination centered at a first angular direction and having a first intensity and with off-axis illumination having a second intensity; and an optical viewing system, that views said portion of the workpiece and accepts light reflected from the workpiece over a range of angular directions, centered at a second angular direction, said range of angular directions defining said on-axis illumination, wherein said first intensity and second intensity art separately adjustable and wherein the first angular direction is different from the second angular direction.
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