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High-sensitivity optical scanning using memory integration (2)

建立日期：2018/02/21
  • 作者： Orbotech
  • 出處： USPTO-美國專利商標局
  • 內容： "本篇內容為Orbotech於October 31, 2006 獲證之美國專利，下文為專利摘要，專利全文請連結參考網址，瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。

    Orbotech在此主題上有3篇專利，將一一介紹。"

    An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

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