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Adaptive tolerance reference inspection system
建立日期:2018/02/21
作者:
Orbotech
出處:
USPTO-美國專利商標局
內容:
本篇內容為Orbotech於September 21, 2004 獲證之美國專利,下文為專利摘要,專利全文請連結參考網址,瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。
Method and apparatus for automatically optically inspecting electrical circuits by matching portions of an electrical circuit being inspected to corresponding portions in a reference, wherein an adaptive spatial tolerance representing a permissible deviation in the location of corresponding portions is applied to a portion. The spatial tolerances for each portion is in part a function of a characteristic of the portion, for example one or more of: the proximity of the portion to other portions of predetermined type, a spatial location of the portion in an electrical circuit, a material from which the portion is formed, the color of the portion and the intensity of light reflected by the portion. Non-defective matching portions an electrical circuit being inspected and in a reference must be separated by a distance which is less than the adaptive spatial tolerance.
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