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System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery

建立日期：2018/02/21
  • 作者： Orbotech
  • 出處： USPTO-美國專利商標局
  • 內容： 本篇內容為Orbotech於April 8, 2008 獲證之美國專利，下文為專利摘要，專利全文請連結參考網址，瀏覽專利全文所需看圖軟體請至 http://www.alternatiff.com/ 下載。

    A method for inspecting an electrical circuit including optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom in a first image during a first time interval, optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence in a second image acquired during a second time interval and indicating defects in the electrical circuit based on geometrically coincident indications from both the optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom and the optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence.
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