X射線反射率薄膜量測技術

X射線反射率（XRR）利用X射線以極低掠入射角照射薄膜表面，量測鏡面反射強度隨角度的變化。當入射角超過臨界角後，來自不同薄膜界面的反射X射線互相干涉，形成Kiessig fringes。藉由反射曲線與層狀薄膜模型擬合，可非破壞性評估薄膜厚度、密度，以及表面與界面粗糙度。
X-ray reflectivity (XRR) measures specular reflected X-ray intensity as a function of grazing incidence angle. Above the critical angle, interference between X-rays reflected at film interfaces produces Kiessig fringes. By fitting the reflectivity profile with a layered-film model, film thickness, density, and surface/interface roughness can be evaluated non-destructively.