技術簡介
Technology Description

S2 PICOFOX為微量元素分析量測系統,具已知內標含量樣品可進行定量分析,無內標樣品亦可進行比例分析。量測參數為體積濃度(液體)、質量(固體)、質量百分比例(無內標樣品)。Mo-Kα光源(17.5 keV)以極低之入射角照射樣品表面達成全反射,進而抑制源於載台之背景X光,提升微量元素X螢光訊號之訊雜比。
S2 PICOFOX is a trace-element analysis system. Quantitative analysis can be performed on samples containing an internal standard of known concentration, while standardless samples can be analyzed for relative elemental proportions. The measurement results can be expressed as volume concentration for liquid samples, mass for solid samples, or percentage composition for standardless analysis. A Mo Kα X-ray source (17.5 keV) irradiates the sample surface at a grazing incidence angle to achieve total reflection. This configuration suppresses background X-rays originating from the sample holder, thereby improving the signal-to-noise ratio of X-ray fluorescence signals from trace elements.

技術規格
Specifications
  • X-ray source energy: 17.5 keV
  • Detectable elements: Aluminum to Uranium
  • Sample requirement: diameter < 1 cm; thickness < 100 μm
  • Detection limit: 1.24 pg for Nickel
  • N2 purge available
S2 PICOFOX
S2 PICOFOX
Quartz sample holder
Quartz sample holder
應用範圍
Applications
  1. 液體微量元素濃度量測
    Trace element concentration measurement in liquid
  2. 固體、粉末微量元素分析
    Trace element analysis in solids and powders
  3. 半導體超純水、化學品微量金屬分析
    Trace metal analysis in UPW and semiconductor chemicals
Spectrum of 1-ng Ni
Spectrum of 1-ng Ni