微分電移動度分析儀量測技術

微分電移動度分析儀搭配凝結粒子計數器(DMA-CPC)是一種奈米氣膠粒子量測技術。DMA依粒子的電遷移率進行粒徑分級，再由CPC將奈米粒子經蒸氣凝結放大後逐顆計數。此技術可量測奈米粒子的粒徑分布與數目濃度，適用於氣膠及經霧化處理之半導體化學品奈米粒子與微量不純物分析。
Differential Mobility Analyzer–Condensation Particle Counter (DMA-CPC) is a nanoparticle measurement technique. The DMA classifies charged particles according to their electrical mobility, while the CPC enlarges nanoparticles through vapor condensation for individual particle counting. This technique provides particle size distribution and number concentration and can be applied to aerosols and aerosolized semiconductor chemical samples for nanoparticle and trace impurity characterization.