薄膜量測系統—分光式橢圓偏光儀

分光式橢圓偏光儀可由實驗上所量得的橢圓偏光函數 tanY與 cosD的最小平方法擬合，來間接的求得薄膜的厚度、折射率、消光係數，是一種無損無接觸的光學測量技術。
A spectroscopic ellipsometer can indirectly determine the film thickness, refractive index, and extinction coefficient by fitting the experimentally measured ellipsometric parameters, tan Ψ and cos Δ, using the least-squares method. It is a non-destructive and non-contact optical metrology technique.