離子層析量測技術

離子層析技術是一種高效能液相分離與精密定量技術，在半導體領域廣泛應用於超純水與空氣中分子污染物(AMC)監控。本技術利用離子交換機制分離樣品中的陰、陽離子，結合電解抑制技術大幅降低淋洗液背景電導，並由高靈敏度電導偵測器或安培偵測器即時量測，精準測定超純水中 ppt 等級超微量的離子成分。
Ion Chromatography (IC) is a high-performance liquid separation and precision quantification technique widely utilized in the semiconductor industry for UPW and AMC monitoring. Coupled with high-sensitivity conductivity or amperometric detectors for real-time measurement, it enables the precise determination of trace-level ionic impurities down to the parts-per-trillion (ppt) level in ultra-pure water.